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National Repository of Grey Literature 2 records found  Search took 0.02 seconds. 
Development of the sample holder for electrical diagnostics in UHV SEM
 Axman, Tomáš ; Pavera, Michal (referee) ; Bábor, Petr (advisor)
This bachelor thesis focuses on design and testing of a sample holder enabling for cooling and heating of the sample in ultra-high vacuum apparatus for scanning electron microscope, developed in cooperation with Tescan company. In the theoretical part the currently used sample holders in similar UHV systems are described and their positives and negatives are discussed including material selection. The experimental part describes designing of the sample holder with respect to the required number of electrical contacts for measuring electrical properties of the samples and UHV compatibility. Measurement and testing of the manufactured sample at low and high temperatures is presented.
Detailed record
Development of the sample holder for electrical diagnostics in UHV SEM
 Axman, Tomáš ; Pavera, Michal (referee) ; Bábor, Petr (advisor)
This bachelor thesis focuses on design and testing of a sample holder enabling for cooling and heating of the sample in ultra-high vacuum apparatus for scanning electron microscope, developed in cooperation with Tescan company. In the theoretical part the currently used sample holders in similar UHV systems are described and their positives and negatives are discussed including material selection. The experimental part describes designing of the sample holder with respect to the required number of electrical contacts for measuring electrical properties of the samples and UHV compatibility. Measurement and testing of the manufactured sample at low and high temperatures is presented.
Detailed record

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